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Etch damage evaluation of low-angle, forward-reflected neutral beam etching

Lee, D. H. / Chung, M. J. / Hwang, H. K. / Yeom, G. Y.

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Etch damage evaluation of low-angle, forward-reflected neutral beam etching

Lee, D. H. / Chung, M. J. / Hwang, H. K. / Yeom, G. Y.

Etch damage evaluation of low-angle, forward-reflected neutral beam etching

Lee, D. H. / Chung, M. J. / Hwang, H. K. / Yeom, G. Y.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Etch damage evaluation of low-angle, forward-reflected neutral beam etching

Contributors:

Lee, D. H. (author) / Chung, M. J. (author) / Hwang, H. K. (author) / Yeom, G. Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 23 ; 221-224

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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