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Investigation of etch characteristics of non-polar GaN by wet chemical etching
Investigation of etch characteristics of non-polar GaN by wet chemical etching
Investigation of etch characteristics of non-polar GaN by wet chemical etching
Hsu, H. C. (author) / Su, Y. K. (author) / Cheng, S. H. (author) / Huang, S. J. (author) / Cao, J. M. (author) / Chen, K. C. (author)
APPLIED SURFACE SCIENCE ; 257 ; 1080-1083
2010-01-01
4 pages
Article (Journal)
English
DDC:
621.35
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