Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors: Fid-Bau Portal

Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors

Csorbai, H. / Furjes, P. / Hars, G. / Ducso, C. / Barsony, I. / Kalman, E. / Deak, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors

Csorbai, H. / Furjes, P. / Hars, G. / Ducso, C. / Barsony, I. / Kalman, E. / Deak, P.

Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors

Csorbai, H. / Furjes, P. / Hars, G. / Ducso, C. / Barsony, I. / Kalman, E. / Deak, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Microwave-CVD Diamond Protective Coating for 3D Structured Silicon Microsensors

Contributors:

Csorbai, H. (author) / Furjes, P. (author) / Hars, G. (author) / Ducso, C. (author) / Barsony, I. (author) / Kalman, E. (author) / Deak, P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 414/415 ; 69-74

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Cristea, D. / Dunare, C. / Cernica, I. et al. | British Library Online Contents | 2000

Mechanical Microsensors

Elwenspoek, Miko | TIBKAT | 2001

Actuation-based microsensors

Bonne, U. / Kubisiak, D. | British Library Online Contents | 2001

Strain Measurement with Microsensors

Itoh, T. / Springer, G. S. | British Library Online Contents | 1997

Diamond-DLC double layer used in corrosive protective coating

Csorbai, H. K. / Kovach, G. / Pet, G. et al. | British Library Online Contents | 2007