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Thickness measurement of nanometer films by XRD on nano-multilayers

Lai, Q. / Yu, X. / Li, G. / Gu, M.

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Thickness measurement of nanometer films by XRD on nano-multilayers

Lai, Q. / Yu, X. / Li, G. / Gu, M.

Thickness measurement of nanometer films by XRD on nano-multilayers

Lai, Q. / Yu, X. / Li, G. / Gu, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thickness measurement of nanometer films by XRD on nano-multilayers

Contributors:

Lai, Q. (author) / Yu, X. (author) / Li, G. (author) / Gu, M. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE LETTERS ; 22 ; 261-263

Publication date:

2003-01-01

Size:

3 pages

ISSN:

0261-8028

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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