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Ultra Precision Polishing with Oscillation Speed Control: an Analysis of the Pressure Distribution and Profile
Ultra Precision Polishing with Oscillation Speed Control: an Analysis of the Pressure Distribution and Profile
Ultra Precision Polishing with Oscillation Speed Control: an Analysis of the Pressure Distribution and Profile
Yoshitomi, K. (author) / Une, A. (author) / Mochida, M. (author) / Gao, Y. / Tamaki, J. / Kitajima, K.
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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