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    Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control

    New search for: Yoshitomi, K.
    New search for: Une, A.
    New search for: Mochida, M.
    New search for: Pearce, T.
    New search for: Gao, Y.
    New search for: Tamaki, J.
    New search for: Kuriyagawa, T.

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    Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control

    New search for: Yoshitomi, K.
    New search for: Une, A.
    New search for: Mochida, M.
    New search for: Pearce, T.
    New search for: Gao, Y.
    New search for: Tamaki, J.
    New search for: Kuriyagawa, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control

    New search for: Yoshitomi, K.
    New search for: Une, A.
    New search for: Mochida, M.
    New search for: Pearce, T.
    New search for: Gao, Y.
    New search for: Tamaki, J.
    New search for: Kuriyagawa, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control

    Contributors:

    Yoshitomi, K. (author) / Une, A. (author) / Mochida, M. (author) / Pearce, T. / Gao, Y. / Tamaki, J. / Kuriyagawa, T.

    Published in:

    Advances in Abrasive Technology VI ; 429-432

    KEY ENGINEERING MATERIALS

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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