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Monte Carlo modeling of amorphization resulting from ion implantation in Si

Pelaz, L. / Marques, L. A. / Aboy, M. / Gilmer, G. / Bailon, L. A. / Barbolla, J.

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Monte Carlo modeling of amorphization resulting from ion implantation in Si

Pelaz, L. / Marques, L. A. / Aboy, M. / Gilmer, G. / Bailon, L. A. / Barbolla, J.

Monte Carlo modeling of amorphization resulting from ion implantation in Si

Pelaz, L. / Marques, L. A. / Aboy, M. / Gilmer, G. / Bailon, L. A. / Barbolla, J.

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Check availability in my library

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Document information

Title:

Monte Carlo modeling of amorphization resulting from ion implantation in Si

Contributors:

Pelaz, L. (author) / Marques, L. A. (author) / Aboy, M. (author) / Gilmer, G. (author) / Bailon, L. A. (author) / Barbolla, J. (author)

Published in:

COMPUTATIONAL MATERIALS SCIENCE ; 27 ; 1-5

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0927-0256

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 510

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