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Boron nitride thin films deposited by RF plasma reactive pulsed laser ablation

Marotta, V. / Orlando, S. / Parisi, G. P. / Santagata, A.

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Boron nitride thin films deposited by RF plasma reactive pulsed laser ablation

Marotta, V. / Orlando, S. / Parisi, G. P. / Santagata, A.

Boron nitride thin films deposited by RF plasma reactive pulsed laser ablation

Marotta, V. / Orlando, S. / Parisi, G. P. / Santagata, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Boron nitride thin films deposited by RF plasma reactive pulsed laser ablation

Contributors:

Marotta, V. (author) / Orlando, S. (author) / Parisi, G. P. (author) / Santagata, A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 208/209 ; 575-581

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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De Giorgi, M. L. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1998

Properties of pulsed laser deposited boron nitride films

Reisse, G. / Weissmantel, S. / Keiper, B. et al. | British Library Online Contents | 1997

Zirconium oxide films deposited by reactive pulsed laser ablation

Flamini, C. / Giardini Guidoni, A. / Teghil, R. et al. | British Library Online Contents | 1999