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RF plasma reactive pulsed laser deposition of boron nitride thin films
RF plasma reactive pulsed laser deposition of boron nitride thin films
RF plasma reactive pulsed laser deposition of boron nitride thin films
Mitu, B. (author) / Bilkova, P. (author) / Marotta, V. (author) / Orlando, S. (author) / Santagata, A. (author)
APPLIED SURFACE SCIENCE ; 247 ; 123-127
2005-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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