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CNx/TiNy films prepared by ion-beam sputtering

Yu, D. L. / He, J. L. / Liu, S. M. / Li, D. C. / Tian, Y. J. / Yanagisawa, O.

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CNx/TiNy films prepared by ion-beam sputtering

Yu, D. L. / He, J. L. / Liu, S. M. / Li, D. C. / Tian, Y. J. / Yanagisawa, O.

CNx/TiNy films prepared by ion-beam sputtering

Yu, D. L. / He, J. L. / Liu, S. M. / Li, D. C. / Tian, Y. J. / Yanagisawa, O.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

CNx/TiNy films prepared by ion-beam sputtering

Contributors:

Yu, D. L. (author) / He, J. L. (author) / Liu, S. M. (author) / Li, D. C. (author) / Tian, Y. J. (author) / Yanagisawa, O. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 38 ; 1471-1477

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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