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Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields
Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields
Active control of melt convection of silicon by electromagnetic force under cusp-shaped magnetic fields
Kakimoto, K. (author) / Tashiro, A. (author) / Ishii, H. (author) / Shinozaki, T. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 341-345
2002-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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