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Silicon melt convection in large size Czochralski crucibles
Silicon melt convection in large size Czochralski crucibles
Silicon melt convection in large size Czochralski crucibles
Virbulis, J. (author) / Wetzel, T. (author) / Tomzig, E. (author) / von Ammon, W. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 353-359
2002-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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Directional solidification and convection in small diameter crucibles
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