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Future roadblocks and solutions in silicon technology as outlined by the ITRS roadmap

Arden, W.

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Future roadblocks and solutions in silicon technology as outlined by the ITRS roadmap

Arden, W.

Future roadblocks and solutions in silicon technology as outlined by the ITRS roadmap

Arden, W.

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Check availability in my library

Order at Subito €

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Title:

Future roadblocks and solutions in silicon technology as outlined by the ITRS roadmap

Contributors:

Arden, W. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 313-319

Publication date:

2002-01-01

Size:

7 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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