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From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

Oechsner, R. / Pfeffer, M. / Pfitzner, L. / Binder, H. / Muller, E. / Vonderstrass, T.

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From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

Oechsner, R. / Pfeffer, M. / Pfitzner, L. / Binder, H. / Muller, E. / Vonderstrass, T.

From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

Oechsner, R. / Pfeffer, M. / Pfitzner, L. / Binder, H. / Muller, E. / Vonderstrass, T.

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Title:

From overall equipment efficiency (OEE) to overall Fab effectiveness (OFE)

Contributors:

Oechsner, R. (author) / Pfeffer, M. (author) / Pfitzner, L. (author) / Binder, H. (author) / Muller, E. (author) / Vonderstrass, T. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 5 ; 333-339

Publication date:

2002-01-01

Size:

7 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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