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Microstructural features of Al-implanted 4H-SiC

Wang, C. M. / Zhang, Y. / Weber, W. J. / Jiang, W. / Thomas, L. E.

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Microstructural features of Al-implanted 4H-SiC

Wang, C. M. / Zhang, Y. / Weber, W. J. / Jiang, W. / Thomas, L. E.

Microstructural features of Al-implanted 4H-SiC

Wang, C. M. / Zhang, Y. / Weber, W. J. / Jiang, W. / Thomas, L. E.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructural features of Al-implanted 4H-SiC

Contributors:

Wang, C. M. (author) / Zhang, Y. (author) / Weber, W. J. (author) / Jiang, W. (author) / Thomas, L. E. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 18 ; 772-779

Publication date:

2003-01-01

Size:

8 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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