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Three-ports Micro ER Valve for ER Suspension Fabricated by Photolithography
Three-ports Micro ER Valve for ER Suspension Fabricated by Photolithography
Three-ports Micro ER Valve for ER Suspension Fabricated by Photolithography
Nakano, M. (author) / Katou, T. (author) / Satou, A. (author) / Miyata, K. (author) / Matsushita, K. (author)
JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES ; 13 ; 503-508
2002-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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