SIMS, RBS and glancing incidence X-ray diffraction studies of thermally annealed Ru/b-SiC interfaces: Fid-Bau Portal

SIMS, RBS and glancing incidence X-ray diffraction studies of thermally annealed Ru/b-SiC interfaces

Roy, S. / Jacob, C. / Zhang, M. / Wang, S. / Tyagi, A. K. / Basu, S.

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SIMS, RBS and glancing incidence X-ray diffraction studies of thermally annealed Ru/b-SiC interfaces

Roy, S. / Jacob, C. / Zhang, M. / Wang, S. / Tyagi, A. K. / Basu, S.

SIMS, RBS and glancing incidence X-ray diffraction studies of thermally annealed Ru/b-SiC interfaces

Roy, S. / Jacob, C. / Zhang, M. / Wang, S. / Tyagi, A. K. / Basu, S.

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Check availability in my library

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Document information

Title:

SIMS, RBS and glancing incidence X-ray diffraction studies of thermally annealed Ru/b-SiC interfaces

Contributors:

Roy, S. (author) / Jacob, C. (author) / Zhang, M. (author) / Wang, S. (author) / Tyagi, A. K. (author) / Basu, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 211 ; 300-307

Publication date:

2003-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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