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    Physical characterization of thin ALD-Al2O3 films

    New search for: Jakschik, S.
    New search for: Schroeder, U.
    New search for: Hecht, T.
    New search for: Krueger, D.
    New search for: Dollinger, G.
    New search for: Bergmaier, A.
    New search for: Luhmann, C.
    New search for: Bartha, J. W.

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    Physical characterization of thin ALD-Al2O3 films

    New search for: Jakschik, S.
    New search for: Schroeder, U.
    New search for: Hecht, T.
    New search for: Krueger, D.
    New search for: Dollinger, G.
    New search for: Bergmaier, A.
    New search for: Luhmann, C.
    New search for: Bartha, J. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Physical characterization of thin ALD-Al2O3 films

    New search for: Jakschik, S.
    New search for: Schroeder, U.
    New search for: Hecht, T.
    New search for: Krueger, D.
    New search for: Dollinger, G.
    New search for: Bergmaier, A.
    New search for: Luhmann, C.
    New search for: Bartha, J. W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Physical characterization of thin ALD-Al2O3 films

    Contributors:

    Jakschik, S. (author) / Schroeder, U. (author) / Hecht, T. (author) / Krueger, D. (author) / Dollinger, G. (author) / Bergmaier, A. (author) / Luhmann, C. (author) / Bartha, J. W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 211 ; 352-359

    Publication date:

    2003-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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