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Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering
Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering
Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering
Tanemura, S. (author) / Koide, S. (author) / Senzaki, Y. (author) / Miao, L. (author) / Hirai, H. (author) / Mori, Y. (author) / Jin, P. (author) / Kaneko, K. (author) / Terai, A. (author) / Nabatova-Gabain, N. (author)
APPLIED SURFACE SCIENCE ; 212-213 ; 279-286
2003-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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