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    An investigation of sidewall adhesion in MEMS

    New search for: Robert Ashurst, W.
    New search for: de Boer, M. P.
    New search for: Carraro, C.
    New search for: Maboudian, R.

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    An investigation of sidewall adhesion in MEMS

    New search for: Robert Ashurst, W.
    New search for: de Boer, M. P.
    New search for: Carraro, C.
    New search for: Maboudian, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    An investigation of sidewall adhesion in MEMS

    New search for: Robert Ashurst, W.
    New search for: de Boer, M. P.
    New search for: Carraro, C.
    New search for: Maboudian, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
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    Document information
    Title:

    An investigation of sidewall adhesion in MEMS

    Contributors:

    Robert Ashurst, W. (author) / de Boer, M. P. (author) / Carraro, C. (author) / Maboudian, R. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 212-213 ; 735-741

    Publication date:

    2003-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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