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Piezoelectric and ferroelectric films for microelectronic applications

Ren, T. L. / Zhao, H. J. / Liu, L. T. / Li, Z. J.

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Piezoelectric and ferroelectric films for microelectronic applications

Ren, T. L. / Zhao, H. J. / Liu, L. T. / Li, Z. J.

Piezoelectric and ferroelectric films for microelectronic applications

Ren, T. L. / Zhao, H. J. / Liu, L. T. / Li, Z. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Piezoelectric and ferroelectric films for microelectronic applications

Contributors:

Ren, T. L. (author) / Zhao, H. J. (author) / Liu, L. T. (author) / Li, Z. J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 99 ; 159-163

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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