A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Creating sub-surface channels in PMMA with ion beam lithography in only one step
Creating sub-surface channels in PMMA with ion beam lithography in only one step
Creating sub-surface channels in PMMA with ion beam lithography in only one step
Gonin, Y. (author) / Munnik, F. (author) / Benninger, F. (author) / Mikhailov, S. (author)
APPLIED SURFACE SCIENCE ; 217 ; 289-293
2003-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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