Deep ion beam lithography in PMMA: Fid-Bau Portal

Deep ion beam lithography in PMMA

Schrempel, F. / Kim, Y. S. / Witthuhn, W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Deep ion beam lithography in PMMA

Schrempel, F. / Kim, Y. S. / Witthuhn, W.

Deep ion beam lithography in PMMA

Schrempel, F. / Kim, Y. S. / Witthuhn, W.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Deep ion beam lithography in PMMA

Contributors:

Schrempel, F. (author) / Kim, Y. S. (author) / Witthuhn, W. (author)

Published in:

APPLIED SURFACE SCIENCE ; 189 ; 102-112

Publication date:

2002-01-01

Size:

11 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Gonin, Y. / Munnik, F. / Benninger, F. et al. | British Library Online Contents | 2003

Deep Punching PMMA

Satapathy, S. / Bless, S. | British Library Online Contents | 2000

Mechanical Behavior Simulation of PMMA for Nano Imprint Lithography Using Molecular Dynamics

Kim, J. Y. / Kim, J. H. / Choi, B. I. | British Library Online Contents | 2007

Deep reactive ion etching of PMMA

Zhang, C. / Yang, C. / Ding, D. | British Library Online Contents | 2004

Variable Shaped Beam lithography

British Library Online Contents | 2009