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Contactless electrical characterization of surface and interface of SOI materials

Nakamura, S. / Watanabe, D. / En, A. / Suhara, M. / Okumura, T.

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Contactless electrical characterization of surface and interface of SOI materials

Nakamura, S. / Watanabe, D. / En, A. / Suhara, M. / Okumura, T.

Contactless electrical characterization of surface and interface of SOI materials

Nakamura, S. / Watanabe, D. / En, A. / Suhara, M. / Okumura, T.

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Order at Subito €

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Document information

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Document information

Title:

Contactless electrical characterization of surface and interface of SOI materials

Contributors:

Nakamura, S. (author) / Watanabe, D. (author) / En, A. (author) / Suhara, M. (author) / Okumura, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 216 ; 113-118

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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