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    Improved surface morphology of sulfur-doped homoepitaxial diamond films by plasma CVD method with SF6 Grading-Doping profile

    New search for: Fujii, S.
    New search for: Hino, S.
    New search for: Kobayashi, T.

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    Improved surface morphology of sulfur-doped homoepitaxial diamond films by plasma CVD method with SF6 Grading-Doping profile

    New search for: Fujii, S.
    New search for: Hino, S.
    New search for: Kobayashi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Improved surface morphology of sulfur-doped homoepitaxial diamond films by plasma CVD method with SF6 Grading-Doping profile

    New search for: Fujii, S.
    New search for: Hino, S.
    New search for: Kobayashi, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Improved surface morphology of sulfur-doped homoepitaxial diamond films by plasma CVD method with SF6 Grading-Doping profile

    Contributors:

    Fujii, S. (author) / Hino, S. (author) / Kobayashi, T. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 216 ; 596-602

    Publication date:

    2003-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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