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Preparation of Diamond-like Carbon films by Plasma Source Ion Implantation

Ma, G.-j. / Wu, Z.-m. / Li, X.

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Preparation of Diamond-like Carbon films by Plasma Source Ion Implantation

Ma, G.-j. / Wu, Z.-m. / Li, X.

Preparation of Diamond-like Carbon films by Plasma Source Ion Implantation

Ma, G.-j. / Wu, Z.-m. / Li, X.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation of Diamond-like Carbon films by Plasma Source Ion Implantation

Contributors:

Ma, G.-j. (author) / Wu, Z.-m. (author) / Li, X. (author)

Published in:

MATERIALS PROTECTION -WUHAN- ; 36 ; 48-50

Publication date:

2003-01-01

Size:

3 pages

ISSN:

1001-1560

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.1

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