Research on Deposition Diamond-Like Carbon Films with End-Hall plasma Ion Source: Fid-Bau Portal

Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

Research on Deposition Diamond-Like Carbon Films with End-Hall plasma Ion Source

Pan, Y.-q. / Zhu, C. / Mi, Q. / Fang, Y.

Access

Check availability in my library

Order at Subito €

Page navigation

Document information

Export, share and cite

Research on Deposition Diamond-Like Carbon Films with End-Hall plasma Ion Source

Pan, Y.-q. / Zhu, C. / Mi, Q. / Fang, Y.

Research on Deposition Diamond-Like Carbon Films with End-Hall plasma Ion Source

Pan, Y.-q. / Zhu, C. / Mi, Q. / Fang, Y.

Access

Check availability in my library

Order at Subito €

Page navigation

Document information

Export, share and cite

Document information

Title:

Research on Deposition Diamond-Like Carbon Films with End-Hall plasma Ion Source

Contributors:

Pan, Y.-q. (author) / Zhu, C. (author) / Mi, Q. (author) / Fang, Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 23 ; 188-190

Publication date:

2005-01-01

Size:

3 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

Unknown

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

Similar titles

Deposition of diamond-like carbon films by plasma enhanced chemical vapour deposition

Choi, S. S. / Kim, D. W. / Joe, J. W. et al. | British Library Online Contents | 1997

Preparation of Diamond-like Carbon films by Plasma Source Ion Implantation

Ma, G.-j. / Wu, Z.-m. / Li, X. | British Library Online Contents | 2003

Characterisation of Diamond-like Carbon Films Prepared by Electrochemical Deposition

Yan, X.-b. / Xu, T. / Wang, B. et al. | British Library Online Contents | 2003

Deposition, Characterization, and Applications of Metal-Doped Diamond-Like Carbon Films

Doll, G. L. / The Minerals, Metals &Materials Society; Materials Processing and Manufacturing Division | British Library Conference Proceedings | 1999

Substrate Effect on the Diamond-Like Carbon Films Synthesized by RF Plasma Enhanced Chemical Vapor Deposition

Tzeng, S. S. / Wu, W. M. / Hsu, J. S. | British Library Online Contents | 2007