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Sidewell surface roughness of sputtered silicon i: surface modelling

Ali, M. Y. / Hung, N. P. / Ngoi, B. K. A. / Yuan, S.

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Sidewell surface roughness of sputtered silicon i: surface modelling

Ali, M. Y. / Hung, N. P. / Ngoi, B. K. A. / Yuan, S.

Sidewell surface roughness of sputtered silicon i: surface modelling

Ali, M. Y. / Hung, N. P. / Ngoi, B. K. A. / Yuan, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Sidewell surface roughness of sputtered silicon i: surface modelling

Contributors:

Ali, M. Y. (author) / Hung, N. P. (author) / Ngoi, B. K. A. (author) / Yuan, S. (author)

Published in:

SURFACE ENGINEERING -LONDON- ; 19 ; 97-103

Publication date:

2003-01-01

Size:

7 pages

ISSN:

0267-0844

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.44

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