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Sidewell surface roughness of sputtered silicon i: surface modelling
Sidewell surface roughness of sputtered silicon i: surface modelling
Sidewell surface roughness of sputtered silicon i: surface modelling
Ali, M. Y. (Autor:in) / Hung, N. P. (Autor:in) / Ngoi, B. K. A. (Autor:in) / Yuan, S. (Autor:in)
SURFACE ENGINEERING -LONDON- ; 19 ; 97-103
01.01.2003
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.44
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