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    Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

    New search for: Umirzakov, B. E.
    New search for: Tashmukhamedova, D. A.
    New search for: Boltaev, E. U.
    New search for: Dzhurakhalov, A. A.

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    Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

    New search for: Umirzakov, B. E.
    New search for: Tashmukhamedova, D. A.
    New search for: Boltaev, E. U.
    New search for: Dzhurakhalov, A. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

    New search for: Umirzakov, B. E.
    New search for: Tashmukhamedova, D. A.
    New search for: Boltaev, E. U.
    New search for: Dzhurakhalov, A. A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Obtaining of epitaxial films of metal silicides by ion implantation and molecular beam epitaxy

    Contributors:

    Umirzakov, B. E. (author) / Tashmukhamedova, D. A. (author) / Boltaev, E. U. (author) / Dzhurakhalov, A. A. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 101 ; 124-127

    Publication date:

    2003-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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