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Dielectric properties of YSZ high-k thin films fabricated at low temperature by pulsed laser deposition

Zhu, J. / Liu, Z. G.

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Dielectric properties of YSZ high-k thin films fabricated at low temperature by pulsed laser deposition

Zhu, J. / Liu, Z. G.

Dielectric properties of YSZ high-k thin films fabricated at low temperature by pulsed laser deposition

Zhu, J. / Liu, Z. G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Dielectric properties of YSZ high-k thin films fabricated at low temperature by pulsed laser deposition

Contributors:

Zhu, J. (author) / Liu, Z. G. (author)

Published in:

MATERIALS LETTERS ; 57 ; 4297-4301

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0167-577X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1105 / 530

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