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Deep Levels in As-Grown 4H-SiC Epitaxial Layers and their Correlation with CVD Parameters
Deep Levels in As-Grown 4H-SiC Epitaxial Layers and their Correlation with CVD Parameters
Deep Levels in As-Grown 4H-SiC Epitaxial Layers and their Correlation with CVD Parameters
Pintilie, I. (author) / Pintilie, L. (author) / Irmscher, K. (author) / Thomas, B. (author) / Bergman, P. / Janzen, E.
2003-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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