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Modelling the Formation of Nano-Sized SiC on Si

Safonov, K. L. / Schmidt, A. A. / Trushin, Y. V. / Kulikov, D. V. / Cimalla, V. / Pezoldt, J.

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Modelling the Formation of Nano-Sized SiC on Si

Safonov, K. L. / Schmidt, A. A. / Trushin, Y. V. / Kulikov, D. V. / Cimalla, V. / Pezoldt, J.

Modelling the Formation of Nano-Sized SiC on Si

Safonov, K. L. / Schmidt, A. A. / Trushin, Y. V. / Kulikov, D. V. / Cimalla, V. / Pezoldt, J.

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Title:

Modelling the Formation of Nano-Sized SiC on Si

Contributors:

Safonov, K. L. (author) / Schmidt, A. A. (author) / Trushin, Y. V. (author) / Kulikov, D. V. (author) / Cimalla, V. (author) / Pezoldt, J. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 591-594

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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