Damage formation and recovery in temperature helium implanted 4H-SiC: Fid-Bau Portal

Damage formation and recovery in temperature helium implanted 4H-SiC

Oliviero, E. / Tromas, C. / Pailloux, F. / Declemy, A. / Beaufort, M. F. / Blanchard, C. / Barbot, J. F.

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Damage formation and recovery in temperature helium implanted 4H-SiC

Oliviero, E. / Tromas, C. / Pailloux, F. / Declemy, A. / Beaufort, M. F. / Blanchard, C. / Barbot, J. F.

Damage formation and recovery in temperature helium implanted 4H-SiC

Oliviero, E. / Tromas, C. / Pailloux, F. / Declemy, A. / Beaufort, M. F. / Blanchard, C. / Barbot, J. F.

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Title:

Damage formation and recovery in temperature helium implanted 4H-SiC

Contributors:

Oliviero, E. (author) / Tromas, C. (author) / Pailloux, F. (author) / Declemy, A. (author) / Beaufort, M. F. (author) / Blanchard, C. (author) / Barbot, J. F. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 289-292

Publication date:

2003-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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