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Characterization of Si(111) crystals implanted with Sb+ ions and annealed by rapid thermal processing
Characterization of Si(111) crystals implanted with Sb+ ions and annealed by rapid thermal processing
Characterization of Si(111) crystals implanted with Sb+ ions and annealed by rapid thermal processing
Labbani, R. (author) / Halimi, R. (author) / Laoui, T. (author) / Vantomme, A. (author) / Pipeleers, B. (author) / Roebben, G. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 102 ; 390-397
2003-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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