XPS Study of N-doped TiO~x Thin Films Prepared By DC Reactive Magnetron Sputtering: Fid-Bau Portal

XPS Study of N-doped TiO~x Thin Films Prepared By DC Reactive Magnetron Sputtering

Zhao, Q. N. / Li, C. L. / He, X. / Zhao, X. J.

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XPS Study of N-doped TiO~x Thin Films Prepared By DC Reactive Magnetron Sputtering

Zhao, Q. N. / Li, C. L. / He, X. / Zhao, X. J.

XPS Study of N-doped TiO~x Thin Films Prepared By DC Reactive Magnetron Sputtering

Zhao, Q. N. / Li, C. L. / He, X. / Zhao, X. J.

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Document information

Title:

XPS Study of N-doped TiO~x Thin Films Prepared By DC Reactive Magnetron Sputtering

Contributors:

Zhao, Q. N. (author) / Li, C. L. (author) / He, X. (author) / Zhao, X. J. (author) / Zhang, L. / Guo, J. / Tuan, W.-H.

Published in:

Composite Materials III ; 457-462

KEY ENGINEERING MATERIALS

Publication date:

2003-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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