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La-doped Copper Nitride Films Prepared by Reactive Magnetron Sputtering

Li, X. / Yang, J. / Zuo, A. / Yuan, Z. / Liu, Z. / Yao, K.

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La-doped Copper Nitride Films Prepared by Reactive Magnetron Sputtering

Li, X. / Yang, J. / Zuo, A. / Yuan, Z. / Liu, Z. / Yao, K.

La-doped Copper Nitride Films Prepared by Reactive Magnetron Sputtering

Li, X. / Yang, J. / Zuo, A. / Yuan, Z. / Liu, Z. / Yao, K.

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Document information

Title:

La-doped Copper Nitride Films Prepared by Reactive Magnetron Sputtering

Contributors:

Li, X. (author) / Yang, J. (author) / Zuo, A. (author) / Yuan, Z. (author) / Liu, Z. (author) / Yao, K. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 25 ; 233-236

Publication date:

2009-01-01

Size:

4 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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