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    Auger electron spectroscopy investigation of sputter induced altered layers in SiC by low energy sputter depth profiling and factor analysis

    New search for: Kosiba, R.
    New search for: Ecke, G.
    New search for: Liday, J.
    New search for: Breza, J.
    New search for: Ambacher, O.

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    Auger electron spectroscopy investigation of sputter induced altered layers in SiC by low energy sputter depth profiling and factor analysis

    New search for: Kosiba, R.
    New search for: Ecke, G.
    New search for: Liday, J.
    New search for: Breza, J.
    New search for: Ambacher, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Auger electron spectroscopy investigation of sputter induced altered layers in SiC by low energy sputter depth profiling and factor analysis

    New search for: Kosiba, R.
    New search for: Ecke, G.
    New search for: Liday, J.
    New search for: Breza, J.
    New search for: Ambacher, O.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Auger electron spectroscopy investigation of sputter induced altered layers in SiC by low energy sputter depth profiling and factor analysis

    Contributors:

    Kosiba, R. (author) / Ecke, G. (author) / Liday, J. (author) / Breza, J. (author) / Ambacher, O. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 220 ; 304-312

    Publication date:

    2003-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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