{311} Defect evolution in Si-implanted Si1-xGex alloys: Fid-Bau Portal

{311} Defect evolution in Si-implanted Si1-xGex alloys

Crosby, R. T. / Jones, K. S. / Law, M. E. / Larsen, A. N. / Hansen, J. L.

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{311} Defect evolution in Si-implanted Si1-xGex alloys

Crosby, R. T. / Jones, K. S. / Law, M. E. / Larsen, A. N. / Hansen, J. L.

{311} Defect evolution in Si-implanted Si1-xGex alloys

Crosby, R. T. / Jones, K. S. / Law, M. E. / Larsen, A. N. / Hansen, J. L.

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Check availability in my library

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Document information

Title:

{311} Defect evolution in Si-implanted Si1-xGex alloys

Contributors:

Crosby, R. T. (author) / Jones, K. S. (author) / Law, M. E. (author) / Larsen, A. N. (author) / Hansen, J. L. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 6 ; 205-208

Publication date:

2003-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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