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Optical determination of thickness and composition of buried strained Si1-xGex HBT alloys
Optical determination of thickness and composition of buried strained Si1-xGex HBT alloys
Optical determination of thickness and composition of buried strained Si1-xGex HBT alloys
Scheirer, C. M. (author) / Jones, R. F. (author) / Nguyen, P. (author) / Pois, H. (author) / Zangooie, S. (author)
APPLIED SURFACE SCIENCE ; 214 ; 75-82
2003-01-01
8 pages
Article (Journal)
English
DDC:
621.35
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