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A nanometer scale surface morphology study of W thin films

Maille, L. / Sant, C. / Garnier, P.

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A nanometer scale surface morphology study of W thin films

Maille, L. / Sant, C. / Garnier, P.

A nanometer scale surface morphology study of W thin films

Maille, L. / Sant, C. / Garnier, P.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A nanometer scale surface morphology study of W thin films

Contributors:

Maille, L. (author) / Sant, C. (author) / Garnier, P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 23 ; 913-918

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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