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Characterization of interfaces in nanoscale semiconductor devices by optimization of depth resolution in SIMS depth profiling
Characterization of interfaces in nanoscale semiconductor devices by optimization of depth resolution in SIMS depth profiling
Characterization of interfaces in nanoscale semiconductor devices by optimization of depth resolution in SIMS depth profiling
Chakraborty, B. R. (author)
APPLIED SURFACE SCIENCE ; 221 ; 143-154
2004-01-01
12 pages
Article (Journal)
English
DDC:
621.35
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