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    Effect of microwave plasmochemical treatment on photoresist material

    New search for: Bordusov, S. V.
    New search for: Zubareva, M. M.
    New search for: Sushko, N. I.

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    Effect of microwave plasmochemical treatment on photoresist material

    New search for: Bordusov, S. V.
    New search for: Zubareva, M. M.
    New search for: Sushko, N. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of microwave plasmochemical treatment on photoresist material

    New search for: Bordusov, S. V.
    New search for: Zubareva, M. M.
    New search for: Sushko, N. I.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Effect of microwave plasmochemical treatment on photoresist material

    Contributors:

    Bordusov, S. V. (author) / Zubareva, M. M. (author) / Sushko, N. I. (author)

    Published in:

    SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY C/C OF ELEKTRONNAIA OBRABOTKA MATERIALOV ; 81-84

    Publication date:

    2002-01-01

    Size:

    4 pages

    ISSN:

    1068-3755

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44 / 660.297

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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