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Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

Chang, K. S. / Aronova, M. A. / Takeuchi, I.

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Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

Chang, K. S. / Aronova, M. A. / Takeuchi, I.

Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

Chang, K. S. / Aronova, M. A. / Takeuchi, I.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Combinatorial pulsed laser deposition using a compact high-throughout thin-film deposition flange

Contributors:

Chang, K. S. (author) / Aronova, M. A. (author) / Takeuchi, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 223 ; 224-228

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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