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Deposition of Aluminium Oxide Films by Pulsed Reactive Sputtering

Mao, X. / Cai, B. / Wu, M. / Chen, G.

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Deposition of Aluminium Oxide Films by Pulsed Reactive Sputtering

Mao, X. / Cai, B. / Wu, M. / Chen, G.

Deposition of Aluminium Oxide Films by Pulsed Reactive Sputtering

Mao, X. / Cai, B. / Wu, M. / Chen, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition of Aluminium Oxide Films by Pulsed Reactive Sputtering

Contributors:

Mao, X. (author) / Cai, B. (author) / Wu, M. (author) / Chen, G. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE AND TECHNOLOGY -SHENYANG- ; 19 ; 368-370

Publication date:

2003-01-01

Size:

3 pages

ISSN:

1005-0302

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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