Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium: Fid-Bau Portal

Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

Van Veen, A. / Galindo, R. E. / Eijt, S. W. H. / Schut, H. / van Gog, H. / Balkenende, A. R. / De Theije, F. K.

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Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

Van Veen, A. / Galindo, R. E. / Eijt, S. W. H. / Schut, H. / van Gog, H. / Balkenende, A. R. / De Theije, F. K.

Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

Van Veen, A. / Galindo, R. E. / Eijt, S. W. H. / Schut, H. / van Gog, H. / Balkenende, A. R. / De Theije, F. K.

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Document information

Title:

Porosity in Silicon and Silica Thin Films Monitored by Positrons and Positronium

Contributors:

Van Veen, A. (author) / Galindo, R. E. (author) / Eijt, S. W. H. (author) / Schut, H. (author) / van Gog, H. (author) / Balkenende, A. R. (author) / De Theije, F. K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 445/446 ; 254-258

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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