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Comparison of Tensile and Bulge Tests for Thin-Film Silicon Nitride

Edwards, R. L. / Coles, G. / Sharpe, W. N.

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Comparison of Tensile and Bulge Tests for Thin-Film Silicon Nitride

Edwards, R. L. / Coles, G. / Sharpe, W. N.

Comparison of Tensile and Bulge Tests for Thin-Film Silicon Nitride

Edwards, R. L. / Coles, G. / Sharpe, W. N.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Comparison of Tensile and Bulge Tests for Thin-Film Silicon Nitride

Contributors:

Edwards, R. L. (author) / Coles, G. (author) / Sharpe, W. N. (author)

Published in:

EXPERIMENTAL MECHANICS ; 44 ; 49-54

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0014-4851

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1

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