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High performance SiGe:C HBTs using atomic layer base doping

Tillack, B. / Yamamoto, Y. / Knoll, D. / Heinemann, B. / Schley, P. / Senapati, B. / Kruger, D.

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High performance SiGe:C HBTs using atomic layer base doping

Tillack, B. / Yamamoto, Y. / Knoll, D. / Heinemann, B. / Schley, P. / Senapati, B. / Kruger, D.

High performance SiGe:C HBTs using atomic layer base doping

Tillack, B. / Yamamoto, Y. / Knoll, D. / Heinemann, B. / Schley, P. / Senapati, B. / Kruger, D.

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Document information

Title:

High performance SiGe:C HBTs using atomic layer base doping

Contributors:

Tillack, B. (author) / Yamamoto, Y. (author) / Knoll, D. (author) / Heinemann, B. (author) / Schley, P. (author) / Senapati, B. (author) / Kruger, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 55-58

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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