Characteristics and processing effects of ZrO2 thin films grown by metal-organic molecular beam epitaxy: Fid-Bau Portal

Characteristics and processing effects of ZrO2 thin films grown by metal-organic molecular beam epitaxy

Kim, M. S. / Ko, Y. D. / Hong, J. H. / Jeong, M. C. / Myoung, J. M. / Yun, I.

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Characteristics and processing effects of ZrO2 thin films grown by metal-organic molecular beam epitaxy

Kim, M. S. / Ko, Y. D. / Hong, J. H. / Jeong, M. C. / Myoung, J. M. / Yun, I.

Characteristics and processing effects of ZrO2 thin films grown by metal-organic molecular beam epitaxy

Kim, M. S. / Ko, Y. D. / Hong, J. H. / Jeong, M. C. / Myoung, J. M. / Yun, I.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characteristics and processing effects of ZrO2 thin films grown by metal-organic molecular beam epitaxy

Contributors:

Kim, M. S. (author) / Ko, Y. D. (author) / Hong, J. H. (author) / Jeong, M. C. (author) / Myoung, J. M. (author) / Yun, I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 227 ; 387-398

Publication date:

2004-01-01

Size:

12 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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