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    Molecular-dynamics analysis of interfacial diffusion between high-permittivity gate dielectrics and silicon substrates

    New search for: Iwasaki, T.

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    Molecular-dynamics analysis of interfacial diffusion between high-permittivity gate dielectrics and silicon substrates

    New search for: Iwasaki, T.

    Access

    Access via TIB
    Check availability in my library
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    Molecular-dynamics analysis of interfacial diffusion between high-permittivity gate dielectrics and silicon substrates

    New search for: Iwasaki, T.

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Molecular-dynamics analysis of interfacial diffusion between high-permittivity gate dielectrics and silicon substrates

    Contributors:

    Iwasaki, T. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 19 ; 1197-1202

    Publication date:

    2004-01-01

    Size:

    6 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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